NdFeB基底温度对TiN防护膜耐腐蚀性的影响

在钕铁硼(NdFeB)稀土永磁体腐蚀防护过程中，针对基底温度对TiN防护膜防护效果影响较大的问题，采用磁控溅射技术在NdFeB永磁体表面沉积TiN防护膜，通过场发射扫描电镜(FESEM)、X射线衍射(XRD)、电化学检测及永磁无损检测等手段对样品进行表征，分析基底温度对TiN膜微观结构及腐蚀防护性能的影响.结果表明:基底温度对TiN薄膜性能影响较大，温度的升高有助于晶粒生长，TiN(111)晶面取向更加明显;腐蚀测试结果显示基底温度300℃时耐腐蚀性最强，但磁性能损失最大.基底温度在100℃时TiN膜层的耐腐蚀性能较强，磁性能损失较小，对基底具有最佳的防护效果.

Effect of Substrate Temperature on Corrosion Resistance of NdFeB-Based TiN Protective Film

In the process of NdFeB rare-earth permanent magnet corrosion protection， the substrate temperature of TiN protective membrane takes a great influence on protective effect. The magnetron sputtering technology was carried out to deposit TiN film on NdFeB permanent magnet surface and the effects of substrate temperature on the microstructure and corrosion protection performance of TiN film were studied through FESEM， XRD， electrochemical detection and permanent magnetic nondestructive testing technologies. The results showed that the substrate temperature had a great influence on the film’s property. The increase of temperature was conducive to the growth of grain and to promote the TiN (111) texture. It was found that the corrosion resistance of the film was the strongest at the substrate temperature of 300℃ with the greatest loss of magnetic property. When the substrate temperature was 100℃， the film had the best protective performance on the substrate， associated with a stronger corrosion resistance and less loss of magnetic property.