两种螺旋波天线对非均匀等离子体波场结构的影响

基于气体工质电离后被射频加热的稳态过程,在石英管中等离子体沿径向不均匀分布条件下,研究分析了1Loop型和Boswell型等2种螺旋波天线激发出的射频波功率对波场结构的影响情况。运用Helic程序求解管内电磁场相关的4个径向微分方程,得到波电场和波磁场的分布情况。通过分析两型天线对螺旋波等离子体波场结构的影响,对比2种天线的性能。结果发现:L型天线激发的波场属于强静电弱磁波场,B型天线激发波场则属于强静电强磁波场;B型天线相比L型天线能够在天线覆盖范围内产生强波电场,该天线下更多功率耦合进了等离子体中。L天线激发波电场受密度梯度影响显著,L天线对靠近壁面处等离子体影响范围大于B天线,B型天线激发波场能量更强。

Different Effect of Two Kinds of Antennas on Wave Field in Radial Non Uniform Helicon Plasma

Based on the steady state process of the gas with RF heating after being ionized in the plasma density Non-uniform distribution conditions in quartz tube, the effect of two kinds of antennas, includes 1 Loop and Boswell, on wave fields analyzed in this paper. Helic program is used to solve four coupled radial differential equations for each kz to obtain the wave field along different direction. The result shows that antenna L motivates a strong electrostatic weak magnetic wave field, antenna B motivates a strong electrostatic strong magnetic wave field; within the antenna range, the antenna B motivates the electric field more strongly than L, and the more power is coupled into plasma. The antenna L is more sensitive to the density gradient, and the affect scope of the plasma near the antenna is greater than that of the B. The wave field motivated by the antenna B is more strong.