基于自适应和模糊控制的新型XY平台同步控制研究

高性能XY平台普遍应用于集成电路(IC)制造和封装设备中.为获得较高加速度,提出了一种单边双直线电机冗余驱动的新型XY定位平台.冗余驱动系统在高速和高加速运动时均存在同步运动精度问题.针对X轴向双直线电机的同步驱动控制,建立了冗余驱动数学模型,并基于模型参考自适应控制和自适应模糊控制算法,设计了运动控制器,确保了同步运动精度.仿真结果表明,在较高加速度运动时,系统具有良好的静态、动态性能和较高的同步运动精度.

Research on Synchronous Control of Novel XY-table Based on Adaptive and Fuzzy Control Methods

High performance XY-table is commonly incorporated into integrated circuit (IC) manufacturing and packaging equipments. In order to achieve a higher acceleration, a novel XY positioning table redundantly driven by one-side dual linear motors was proposed. The redundant drive system commonly suffers from synchronous motion precision problem at high speed and acceleration rates. The mathematical model of dual linear motors redundant drive system along X-axis direction was given. Meanwhile, motion controllers were designed based on model reference adaptive control and adaptive fuzzy control algorithms to assure the synchronous motion precision. The simulation results show that the control system has better static and dynamic performance and higher synchronous motion precision at a high acceleration profile motion.