| 第二类弱奇性Volterra积分方程的求解──在活动边界杂质扩散问题中的级数解 |
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| 引用本文： | 刘英,郑克旺,任世伟.第二类弱奇性Volterra积分方程的求解──在活动边界杂质扩散问题中的级数解[J].河北科技大学学报,1996(1). |
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| 作者姓名： | 刘英 郑克旺 任世伟 |
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| 作者单位： | 河北轻化工学院基础课部，河北师范大学物理系，石家庄市广播电视大学 |
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| 摘 要： | 分子束外延工艺广泛地应用到微电子器件的研究和制作，分子束外延过程中杂质的扩散问题可归结为活动边界的杂质扩散问题，研究该类问题时，常需求解第二类弱奇性Ｖｏｌｔｅｒｒａ积分方程。本文运用正、反Ｌａｐｈｃｅ变换和幂级数展开的方法，首次给出了该类含有卷积核的弱奇性Ｖｏｌｔｅｒｒａ积分方程的级数解，并探讨了级数解的适用范围。
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| 关 键 词： | 分子束外延，Volterra奇性积分方程，Laplace变换，级数解 |
The Solution of the Second Type of Weak Singularity Volterra Integral Equation ──the Series Solution for the Problem of Foreign Substance Proliferation with Moving Boundary |
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| Liu Ying, Zheng Kewang, Ren Shiwei.The Solution of the Second Type of Weak Singularity Volterra Integral Equation ──the Series Solution for the Problem of Foreign Substance Proliferation with Moving Boundary[J].Journal of Hebei University of Science and Technology,1996(1). |
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| Authors: | Liu Ying Zheng Kewang Ren Shiwei |
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| Institution: | Department of Fundamemtal Courses |
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| Abstract: | The molecular-beam-epitaxy (MBE) technique is employed currently in the investigation and fabrication of the microelectronic devices. The problem of foreign substance proliferation in the process of MilE is a problem of foreign substance proliferation with moving boundary. It needs to know the solution of the second type of week singular Volterra integral equation as often as to study this problem. In this paper, the Laplace transform and inverse Laplace transform and the power series expansion are used to give the series solution of the week singularity Volterra integral equation with a faltung kernel for the first time, and the scope of suitability of the series solution is discussed. |
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| Keywords: | MBE singularity Voltreea integral equation Laplace transform series solution |
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