| 影响真空蒸发镀膜膜厚的因素分析 |
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| 引用本文： | 高雁.影响真空蒸发镀膜膜厚的因素分析[J].太原科技,2008,176(9). |
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| 作者姓名： | 高雁 |
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| 作者单位： | 忻州师范学院物理系,山西,忻州,034000 |
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| 摘 要： | 介绍了真空蒸发镀膜的基本原理,对蒸发镀膜过程中影响镀膜厚度的因素进行了理论计算和实验分析,从而找出对镀膜厚度的影响规律.
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| 关 键 词： | 真空蒸发镀膜 薄膜厚度 镀料质量 |
Influencing Factor on the Thickness of Vacuum Evaporating Coating Films |
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| GAO Yan.Influencing Factor on the Thickness of Vacuum Evaporating Coating Films[J].Taiyuan Science and Technology,2008,176(9). |
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| Authors: | GAO Yan |
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| Abstract: | In this paper,the basically principle of vacuum evaporating coating films was presented.We analyzed the theoretical calculation and experimental methods,and how these two factors affected the thickness of vapour coating films,and at the final,some conclusions were given. |
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| Keywords: | vacuum evaporating coating films thickness of film the mass of coating material |
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