脉冲激光沉积类金刚石薄膜的厚度均匀性建模

在脉冲激光沉积类金刚石薄膜过程中,针对薄膜均匀性差的问题,提出偏轴沉积、脉冲激光扫描沉积、双光束沉积和多光束沉积等模式来改善薄膜的均匀性。初步建立了脉冲激光沉积类金刚石薄膜厚度均匀性模型,并分别进行了薄膜厚度分布的模拟,在模拟过程中,强调了在不影响薄膜性能的基础上改善薄膜均匀性,并讨论了沉积模式对薄膜颗粒物问题的影响。结果表明,采用多光束沉积薄膜,厚度均匀性得到极大改善,而且颗粒物问题也得到了改善。最后提出模型改良意见。

The Thickness Uniformity Modeling for DLC Films Obtained by PLD

Four models comprising offset model,laser scan model,two laser beams model and many laser beams model were presented to improve the films' thickness uniformity aiming at the films' poor thickness uniformity in the process of growing DLC films by PLD.The DLC films' thickness uniformity models were initially established and simulation of the films' thickness distribution was performed respectively.In the simulation process,improving the films' thickness uniformity was emphasized on the basis of the films' optimum performance.And the elimination of micrometer and sub-micrometer sized particulates was discussed.The results indicate that in the many laser beams model PLD can grow DLC films with better thickness uniformity.And in this model the micrometer and sub-micrometer sized particulates in the films also decrease.At last,some suggestions were brought forward to improve the models.