| 纳米级压电陶瓷微位移系统的研究 |
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| 引用本文： | 于思远,林滨,韩雪松,刘殿通,刘文芝,刘金华.纳米级压电陶瓷微位移系统的研究[J].天津大学学报(自然科学与工程技术版),2000,33(4):537-540. |
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| 作者姓名： | 于思远 林滨 韩雪松 刘殿通 刘文芝 刘金华 |
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| 作者单位： | 天津大学机械学院,天津 |
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| 基金项目： | 国家自然科学基金资助项目(59975069)．天津大学纳米中心课题． |
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| 摘 要： | 介绍了一种用于纳米磨削的新型微位移系统，该系统由压电陶瓷微位移工作台和计算机控制的专用驱动电源组成，系统精度与压电陶瓷致动器和控制系统密切相关。阐述了以压电陶瓷致动器为核心的微位移工作台和驱动电源的设计原理和设计特点，并用已研制成的高精度高分辩率微位移系统实现了陶瓷样件的纳米镜面磨制。
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| 关 键 词： | 纳米级 压电陶瓷 微位移系统 超精密加工 |
| 文章编号： | 0493-2137(2000)04-0537-04 |
| 修稿时间： | 1999-12-12 |
DEVELOPMENT OF NANOMETER GRADE MICRO-DISPLACEMENTSYSTEM OF PIEZOELECTRIC CERAMICS |
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| YU Si-yuan,LIN Bing,HAN Xue-song,LIU Dian-tong,LIU Wen-zhi,LIU Jing-hua.DEVELOPMENT OF NANOMETER GRADE MICRO-DISPLACEMENTSYSTEM OF PIEZOELECTRIC CERAMICS[J].Journal of Tianjin University(Science and Technology),2000,33(4):537-540. |
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| Authors: | YU Si-yuan LIN Bing HAN Xue-song LIU Dian-tong LIU Wen-zhi LIU Jing-hua |
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| Institution: | YU Si-yuan
,LIN Bing
,HAN Xue-song
,LIU Dian-tong
,LIU Wen-zhi
,LIU Jing-hua
;(School of Mechanical Engineering, Tianjin University, Tianjin 300072, China) |
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| Abstract: | This paper introduces a nanometer grade micro displacement system suitable for ultraprecision grinding.It consists of a table driven by a piezoelectric ceramic actuator and a special driving power controlled by a computer.The systematic accuracy bears a relation to the actuator and driving power.The paper describes the design principle,the characteristics of the piezoelectric ceramic actuator and driving power,and then realizes nanometer mirror grinding of engineering ceramic samples using the high precision micro displacement system developed. |
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| Keywords: | nanometer grade piezoelectric ceramics micro-displacement system |
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