| 基于PSD的导轨直线度测量 |
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| 引用本文： | 刘兆栋,韩志刚,于丽娜,陈磊.基于PSD的导轨直线度测量[J].东南大学学报(自然科学版),2009(Z2). |
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| 作者姓名： | 刘兆栋 韩志刚 于丽娜 陈磊 |
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| 作者单位： | 南京理工大学电子工程与光电技术学院;中国电子科技集团第45所; |
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| 摘 要： | 设计了2种检测系统测量直线导轨的直线度.检测系统1利用随导轨运动的平面镜二维转角表征导轨的俯仰角和偏摆角的误差,这些角度误差通过光学系统在PSD上以位移的形式被记录下来,分析计算位移与角度的关系可得俯仰角和偏摆角.检测系统2利用随导轨运动的棱镜系统将俯仰角和滚转角的误差以位移的形式记录在PSD上,通过去除检测系统1测得的俯仰角的影响可求得滚转角.实验测量了500mm长导轨俯仰角、偏摆角和滚转角的最大偏差分别为3.22,′1.16′和5.88.′分析了实验系统误差对于测试结果的影响,结果表明,测试精度可达0.2.″
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| 关 键 词： | 光学测量 导轨 直线度 PSD |
Straightness error measurement of a slideway based on position sensitive detector |
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| Liu Zhaodong Han Zhigang Yu Lina Chen Lei.Straightness error measurement of a slideway based on position sensitive detector[J].Journal of Southeast University(Natural Science Edition),2009(Z2). |
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| Authors: | Liu Zhaodong Han Zhigang Yu Lina Chen Lei |
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| Institution: | Liu Zhaodong1 Han Zhigang1 Yu Lina2 Chen Lei1(1 School of Electrical Engineering , Optoelectronic Technology,Nanjing University of Science , Technology,Nanjing 210094,China) (2 The 45th Research Institute of China Electronics Technology Group Corporation,Beijing 101601,China) |
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| Abstract: | Two test systems are designed to measure the straightness error of a slideway.In system one a mirror is mounted on a moving stage on the slideway.The two-dimensional rotation angle of the mirror demonstrates the yaw and pitch angle error of the slideway according to the movement of the mirror.These angle errors are recorded with position sensitive detector(PSD) in the form of displacement,and the relationship between the displacement and the angle is calculated to obtain the yaw and pitch angle.In system tw... |
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| Keywords: | optical test slideway straightness position sensitive detector |
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