| 用于等离子体喷射金钢石膜设备的循环水冷却系统 |
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| 引用本文： | 臧建民,孙振路.用于等离子体喷射金钢石膜设备的循环水冷却系统[J].河北省科学院学报,1999,16(1):1-3. |
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| 作者姓名： | 臧建民 孙振路 |
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| 作者单位： | 河北省科学院激光研究所，河北省机电一体化中试基地 |
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| 摘 要： | 本文论述了用于等离子体喷射金钢石膜设备的循环水冷却系统的特点和基本原理，给出了系统的有关参数和使用结果。
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| 关 键 词： | 金刚石膜，冷却水，循环系统 |
A COOLING WATER CYCLE SYSTEM USED IN THE EQUIPMENT OF DC PLASMA JET CVD DIAMOND |
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| Zang Jianmin,Sun Zhenlu,Guo Hui,Wu Xiaobo.A COOLING WATER CYCLE SYSTEM USED IN THE EQUIPMENT OF DC PLASMA JET CVD DIAMOND[J].Journal of The Hebei Academy of Sciences,1999,16(1):1-3. |
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| Authors: | Zang Jianmin Sun Zhenlu Guo Hui Wu Xiaobo |
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| Institution: | Zang Jianmin Sun Zhenlu Guo Hui Wu Xiaobo |
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| Abstract: | This paper introduces the cooling water cycle system,which is used in the equipment of DC plasma jet CVD diamond film.The features and basic principles of the system are discussed and the design parameters are analyzed. |
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| Keywords: | Diamond films Cooling water Cycle system |
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