| 薄膜工艺中的系统仿真研究 |
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| 引用本文： | 王庆章,赵庚申,许盛之,王瑜. 薄膜工艺中的系统仿真研究[J]. 南开大学学报(自然科学版), 2006, 39(6): 45-48 |
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| 作者姓名： | 王庆章 赵庚申 许盛之 王瑜 |
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| 作者单位： | 南开大学,光电子薄膜器件与技术研究所,天津,300071;南开大学,光电子薄膜器件与技术研究所,天津,300071;南开大学,光电子薄膜器件与技术研究所,天津,300071;南开大学,光电子薄膜器件与技术研究所,天津,300071 |
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| 摘 要： | 简要介绍了系统仿真的概念,结合利用软件FLUENT对簿膜工艺喷雾气流场进行流人本力学仿真的实例,介绍了建模、仿真的步骤.给出了详细的数学建模和几何建模的方法,最后给出了利用模型进行仿真的结果,并对仿真结果进行了分析.结果表明,系统仿真技术可以大大提高设计效率,降低设计成本,加深对工艺过程的理解,不失为一种新的研究方法.
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| 关 键 词： | 系统仿真 薄膜 沉积 喷雾气流场 |
| 文章编号： | 0465-7942(2006)06-0045-04 |
| 收稿时间： | 2006-07-15 |
| 修稿时间： | 2006-07-15 |
Application of System Simulation in Thin Film Manufacturing |
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| Wang Qingzhang,Zhao Gengshen,Xu Shengzhi,Wang Yu. Application of System Simulation in Thin Film Manufacturing[J]. Acta Scientiarum Naturalium University Nankaiensis, 2006, 39(6): 45-48 |
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| Authors: | Wang Qingzhang Zhao Gengshen Xu Shengzhi Wang Yu |
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| Affiliation: | Institute of Photo-electronics Device and Technology of Thin Film, Nankai University, Tianjin 300071, China |
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| Abstract: | The concept of system simulation was introduced with the example of simulating the spray field in thin film deposition.The steps of modeling and simulating were given also in the paper.The method to construct mathematics model and geometry model was given in details.The simulation was preceded and analyzed.System simulation is helpful in getting higher efficient,lower cost,and deeper understanding. |
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| Keywords: | system simulation thin film deposition spraying field |
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