无阀微泵压电特性分析及性能测试

提出了一种用于微量试剂分析的压电驱动微泵模型.该微泵模型采用压电阵子驱动、硅基泵体以及聚二甲基硅氧烷（polydimethylsiloxane, PDMS）封装而成.对压电阵子振动模态进行有限元分析，得出1~4阶模态及驱动频率，使微泵容积效率为最大的应为1阶模态.通过对微泵压电 应力耦合场进行数值分析，得出微泵最佳驱动频率范围应小于1 kHz.最后，采用微系统加工方法制作出微泵模型，并对其性能进行测试.结果表明：电压为100 V(p-p)的正弦波驱动下，频率为60和200 Hz时，微泵流量最大达到34.5 μL/min，而当频率在60~600 Hz时微泵压力最大达到657 Pa，与数值分析结果相吻合.

Piezoelectric Analysis and Testing of Valve-less Micropump

A piezoelectric micropump model was proposed for microanalytical reagent by using a piezoelectric transducer as the driving force, a silicon substrate pump and polydinethylsiloxane polymeric membrane material. In order to achieve the maximum driving energy, the modals and driving frequency of the piezoelectric transducer was analyzed using finite element analysis (FEA). It was found out that the pump volumetric efficiency reached the maximum on the first order modal. The best frequency range was between 0 and 1 kHz according to piezoelectric stress coupling analysis. Finally, the micropump models were fabricated with the micro-system fabrication technology, and a performance testing was conducted. The result show that the flow rates reach the maximum value at 60 Hz and 200 Hz under sine driving signal, and the pressure head reaches the maximum value at 60 to 600 Hz, which conforms to the numerical analysis result. The maximum flow rate and pressure head is 34.5 μL/min and 657 Pa according to the experiment.