| 基于CAN总线的洁净室控制系统设计与开发 |
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| 引用本文： | 王慧锋,王长龙.基于CAN总线的洁净室控制系统设计与开发[J].江南大学学报(自然科学版),2006,5(4):489-492. |
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| 作者姓名： | 王慧锋 王长龙 |
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| 作者单位： | 华东理工大学,自动化研究所,上海,200237 |
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| 摘 要： | 研究了CAN总线技术在洁净室控制系统中的应用,介绍了CAN总线及CANopen协议的特点,并给出了洁净室控制系统的解决方案.从现场测试结果看,系统有较好的稳定性和高精度的温度控制,满足了半导体行业的生产要求.
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| 关 键 词： | 现场总线 洁净室 风机过滤单元 |
| 文章编号： | 1671-7147（2006）04-0489-04 |
| 收稿时间： | 2006-02-28 |
| 修稿时间： | 2006-06-19 |
Design and Development of Clean-Room Control System Based on CANbus |
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| WANG Hui-feng,WANG Chang-long.Design and Development of Clean-Room Control System Based on CANbus[J].Journal of Southern Yangtze University:Natural Science Edition,2006,5(4):489-492. |
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| Authors: | WANG Hui-feng WANG Chang-long |
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| Institution: | Research Institute of Automation, East China University of Science and Technology, Shanghai 200237,China |
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| Abstract: | This paper studies the application of CANbus technology in CleanRoom control system,introduces features of the CANbus and CANopen protocol and gives the solution of CleanRoom control system.According to the test result on the site,the system offers high stability and accurate temperature control.It satisfies the requirements of semiconductor production. |
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| Keywords: | fieledbus cleanroom FFU |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
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