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Mn掺杂GaN纳米条的制备和性质的研究
引用本文:刘文军,薛成山,石锋,庄惠照,郭永福.Mn掺杂GaN纳米条的制备和性质的研究[J].山东科学,2010,23(1):28-31.
作者姓名:刘文军  薛成山  石锋  庄惠照  郭永福
作者单位:山东师范大学物理与电子科学学院半导体研究所
摘    要:通过在1000℃下氨化锰掺杂Ga2O3薄膜制备了大量GaMnN纳米条。采用此法得到的剑状Mn掺杂GaN纳米条是六方纤锌矿结构,Mn的原子百分比是5.43%,纳米条的厚度大约为100 nm,宽度为200~400nm。X射线衍射(XRD)、扫描电镜(SEM)、透射电子显微镜(TEM)、高分辨透射电子显微镜(HRTEM)、选区电子衍射(SAED)、X射线光电子能谱(XPS)和荧光分光光度计(PL)用于表征所制备纳米条形貌及光学性质。室温下以325 nm波长的光激发样品表面,发现由于Mn的掺杂使GaN的发光峰有较大的红移。最后,简单讨论了GaN纳米条的生长机制。

关 键 词:GaN纳米条  Mn  磁控溅射  纳米结构  
收稿时间:2009-11-20

Fabrication, Morphology and Optical Properties of Mn-Doped GaN Nanobars
LIU Wen-jun,XUE Cheng-shen,SHI Feng,ZHUANG Hui-zhao,GUO Yong-fu.Fabrication, Morphology and Optical Properties of Mn-Doped GaN Nanobars[J].Shandong Science,2010,23(1):28-31.
Authors:LIU Wen-jun  XUE Cheng-shen  SHI Feng  ZHUANG Hui-zhao  GUO Yong-fu
Institution:Institute of Semiconductors, College of Physics and Electronics, Shandong Normal University
Abstract:We propose a new approach for large-scale manufacture of GaMnN nanobars by ammoniated Mn doped Ga2O3 films at 1000℃. The obtained sword-like Mn-doped GaN nanobars are single-crystal hexagonal structure and the atom percentage of Mn is 5.43%. Their thickness and width are approximately 100 nm and 200 -400 nm. These nanobars are characterized with X-ray diffraction (XRD), scanning electron microscope (SEM), X-ray photoelectron spectroscopy (XPS), high-resolution transmission eleetron microscopy (HRTEM) and photoluminescence (PL). The GaN nanobars exhibit two emission bands with two well-defined PL peaks at 388 nm and 409 nm. The significant red-shift manifests for the photoluminescence of GaN due to Mn doping. We also briefly discuss the growth mechanism of crystalline GaN nanobars.
Keywords:Mn
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