Double-side fabrication process and millimeter wave response of intrinsic Josephson junctions

We adopted double-side fabrication process to prepare intrinsic Josephson junctions (IJJs) based on Bi₂Sr₂CaCu2O_8+x (BSCCO) single crystals. Using crystal cleavage and double-side argon ion milling, we have successfully fabricated very uniform IJJs with the thickness of single crystal slice less than 200 nm. Using quasi-optical system, the response of the IJJs to millimeter wave radiation was studied. With applied magnetic field perpendicular to a-b plane, we have observed Shapiro steps under millimeter wave radiation, and the Josephson oscillation of each junction was phase-locking. Supported by the National Natural Science Foundation of China (Grant Nos. 60571007, 10778602, 60721063, 60610050), National Basic Research Program of China (Grant No. 2006CB601006) and the Fund of Jiangsu Province (Grant No. BK2007713)