| 丙酮对金刚石膜生长速率的影响 |
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| 引用本文： | 顾长志,金曾孙,吕宪义,邹广田.丙酮对金刚石膜生长速率的影响[J].吉林大学学报(理学版),1997(1). |
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| 作者姓名： | 顾长志 金曾孙 吕宪义 邹广田 |
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| 作者单位： | 吉林大学超硬材料国家重点实验室!长春，130023，吉林大学超硬材料国家重点实验室!长春，130023，吉林大学超硬材料国家重点实验室!长春，130023，吉林大学超硬材料国家重点实验室!长春，130023 |
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| 摘 要： | 采用灯丝热解化学气相沉积方法，在不同的碳源气体气氛中合成金刚石薄膜，并研究不同工艺条件下的金刚石膜生长速率．结果表明，在较低的灯丝分解气体温度和较近的灯丝与衬底距离条件下，以丙酮为碳源气体合成的金刚石膜具有较高的生长速率和较好的质量．
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| 关 键 词： | 金刚石膜， 灯丝热解化学气相沉积方法 生长速率 丙酮 |
The Effects of Acetone on the Growth Rate of Diamond Films |
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| Gu Changzhi, Jin Zengsun, Lu Xiangyi, Zou Guangtian.The Effects of Acetone on the Growth Rate of Diamond Films[J].Journal of Jilin University: Sci Ed,1997(1). |
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| Authors: | Gu Changzhi Jin Zengsun Lu Xiangyi Zou Guangtian |
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| Abstract: | Diamond films were synthesized by means of HFCVD method in gaseous mixtures of acetone (or methane) and hydrogen, the growth characteristic of diamond films was studled under different deposition conditions. The results show that diamond films having a high growth rate and a goodquality can be synthesized by uslng acetone under the condtions of lower temperature of filament andshort distance between filament and substrate. |
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| Keywords: | diamond film HFCVD growth rate acetone |
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