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| 用于微纳米测量的磁流变阻尼固紧系统 | |
| 引用本文： | 马文平,余晓芬,程伶俐,余卿. 用于微纳米测量的磁流变阻尼固紧系统[J]. 应用科学学报, 2010, 28(1): 106-110 |
| 作者姓名： | 马文平 余晓芬 程伶俐 余卿 |
| 作者单位： | 合肥工业大学仪器科学与光电工程学院，合肥230009 |
| 摘 要： | 研究用新型功能材料--磁流变液制作阻尼固紧器，具有减小电机振动和实现微冲击固紧工作台的双重功能. 通过有限元分析对其磁路进行了仿真，并用往复运动实验系统对其性能进行了标定. 在纳米三坐标测量机上进行的纳米定位实验表明，加上磁流变阻尼固紧器后，工作台定位稳态波动从20 nm减小到5 nm以内，可实现纳米三坐标测量机纳米级定位稳态波动. |
| 关 键 词： | 磁流变液 磁流变阻尼固紧器 微冲击固紧 定位 纳米三坐标测量机 |
| 收稿时间： | 2009-09-17 |
| 修稿时间： | 2009-12-03 |
MRF Locking Damper for Micrometer/Nanometer Measurement |
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| MA Wen-ping,YU Xiao-fen,CHENG Ling-li,YU Qing. MRF Locking Damper for Micrometer/Nanometer Measurement[J]. Journal of Applied Sciences, 2010, 28(1): 106-110 | |
| Authors: | MA Wen-ping YU Xiao-fen CHENG Ling-li YU Qing |
| Affiliation: | School of Instrument Science and Opto-electronics Engineering, Hefei University of Technology, Hefei 230009, China |
| Abstract: | A locking damper based on the new functional materials, magnetorheological fluids, is studied. It can reduce vibration of driving motor and make a micro-impact locking for the working table. The magnetic circuit is simulated with finite element analysis and the property is calibrated using a reciprocating experimental system. It is used in Nano-CMM for nano-positioning experiments, showing that positioning steady-state fluctuation of the working table is reduced from 20 nm to less than 5 nm when the MRF locking damper is used. It ensures the nano-degree positioning steady-state fluctuation in Nano-CMM. |
| Keywords: | magnetorheological fluids MRF locking damper micro-impact locking positioning Nano-CMM |
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