| NiO-In2O3薄膜/锡掺杂玻璃光波导传感元件及其气敏性 |
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| 引用本文： | 姑丽各娜·买买提依明,阿布力孜·伊米提.NiO-In2O3薄膜/锡掺杂玻璃光波导传感元件及其气敏性[J].科学通报,2012,57(1):47-51. |
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| 作者姓名： | 姑丽各娜·买买提依明 阿布力孜·伊米提 |
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| 作者单位： | 新疆大学化学化工学院;喀什师范学院化学与环境科学系 |
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| 基金项目： | 国家自然科学基金(20965008)资助 |
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| 摘 要： | 通过溶胶凝胶法(sol-gel)研制了NiO-In2O3复合薄膜/锡掺杂玻璃光波导传感元件,并对传感元件的气敏性能进行了研究.实验结果表明,该传感元件对浓度为1×10-4(体积分数)的二甲苯气体具有较好的选择性,在常温下该传感元件能够检测到二甲苯气体的最低浓度是1×10-7(体积分数),所对应的响应及回复时间分别是3和26s,实验相对标准偏差范围是18%±1%.
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| 关 键 词： | 光波导气敏元件 溶胶凝胶法 NiO-In2O3复合薄膜 气敏性 二甲苯 |
| 收稿时间： | 2011-08-01 |
NiO-In2O3 composite thin film/tin-diffused glass optical waveguide sensor and its gas sensitivity properties |
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| GULGINA Mamtimin,ABLIZ Yimit.NiO-In2O3 composite thin film/tin-diffused glass optical waveguide sensor and its gas sensitivity properties[J].Chinese Science Bulletin,2012,57(1):47-51. |
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| Authors: | GULGINA Mamtimin ABLIZ Yimit |
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| Institution: | GULGINA Mamtimin1,2 & ABLIZ Yimit1 1 College of Chemistry and Chemical Engineering,Xinjiang University,Urumqi 830046,China;2 Department of Chemistry and Envirenmental Scienece,Kashgar Teachers College,Kashgar 844006,China |
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| Abstract: | This paper studied the gas sensitivity of a NiO-In2O3 composite thin film/tin-diffused glass optical waveguide sensor.The sensitive element was synthesized by a sol-gel method.The sensor was fabricated by coating a tin-doped glass optical waveguide with a NiO-In2O3 thin film.The optical waveguide sensor was fixed onto a gas sensor system to detect gaseous volatile organic compounds(VOCs) .The sensor showed high sensitivity towards xylene gas at room temperature;it responded significantly to 1×10-7(volume ratio) of xylene vapor and the response and recovery times were short(less than 3 and 26 s,respectively) .The relative standard deviation of the output light intensity was 18%±1%. |
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| Keywords: | optical waveguide gas sensor sol-gel method NiO-In2O3 composite film gas sensitivity xylene |
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