| 一维热波法测量薄膜纵向热扩散系数 |
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| 引用本文： | 沈超,曾志刚,沈斌杰,胡志宇.一维热波法测量薄膜纵向热扩散系数[J].上海交通大学学报,2012,46(7):1159-1162. |
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| 作者姓名： | 沈超 曾志刚 沈斌杰 胡志宇 |
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| 作者单位： | (上海大学 纳微能源研究所， 上海 200444) |
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| 基金项目： | 科技部国际合作项目(2009DFB60160);上海市科委资助项目(10520710400、10PJ1403800、0852NM01700、08160706000) |
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| 摘 要： | 针对薄膜样品的纵向热扩散系数测量的困难性，研究了利用稳态纵向热流法(SCHF)的测量结构和Angstrm法的一维热波理论相结合的方法，分析了热波在样品中传播的过程，并导出了样品的纵向热扩散系数.文中测量了厚度为30 μm~1 mm的聚四氟乙烯、聚氯乙烯和聚丙烯薄膜，结果表明，该方法是真实可信的.
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| 关 键 词： | 热扩散系数 热波 纵向 薄膜 |
| 收稿时间： | 2011-09-05 |
Measurement of Cross-plane Thermal Diffusivity of Thin-Films by Thermal Wave Method |
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| SHEN Chao,ZENG Zhi-gang,SHEN Bin-jie,HU Zhi-yu.Measurement of Cross-plane Thermal Diffusivity of Thin-Films by Thermal Wave Method[J].Journal of Shanghai Jiaotong University,2012,46(7):1159-1162. |
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| Authors: | SHEN Chao ZENG Zhi-gang SHEN Bin-jie HU Zhi-yu |
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| Institution: | (Institute of Nano Micro Energy，Shanghai University， Shanghai 200444，China) |
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| Abstract: | Considering the difficulty of measuring cross-plane thermal diffusivity of thin films, a new method of measuring the cross-plane thermal diffusivity of thin films was approached by combining the apparatus of steady-state comparative-longitudinal heat flow (SCHF) method and the one-dimensional thermal wave in Angstr-m method. The propagation of thermal wave was analyzed and the cross-plane thermal diffusivity of thin films was deduced. By this method, three types of thin films samples (PTFE, polyvinylchloride and polypropylene) with various thicknesses ranging from 30 μm-1 mm were tested and this method is reliable. |
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| Keywords: | thermal diffusivity thermal wave cross-plane thin-film |
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