| TiO_2薄膜的制备方法研究 |
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| 引用本文： | 李石周,廖华,王建秋,谢明达,李泽东,刘涛. TiO_2薄膜的制备方法研究[J]. 云南师范大学学报(自然科学版), 2014, 0(2): 52-55 |
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| 作者姓名： | 李石周 廖华 王建秋 谢明达 李泽东 刘涛 |
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| 作者单位： | 云南师范大学太阳能研究所,教育部可再生能源材料先进技术与制备重点实验室,云南省农村能源重点工程实验室,云南昆明650092 |
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| 摘 要： | 通过对各种TiO2薄膜制备方法的对比,得到:磁控溅射法是目前制备TiO2薄膜的最佳方法;离子束溅射法和热解法尽管相关研究较少,但是值得进一步研究.
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| 关 键 词： | 二氧化钛 薄膜 制备 |
Preparation Methods of TiO2 Thin Film |
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| LI Shi-zhou,LIAO Hua,WANG Jian-qiu,XIE Ming-da,LI Ze-dong,LIU Tao. Preparation Methods of TiO2 Thin Film[J]. Journal of Yunnan Normal University (Natural Sciences Edition), 2014, 0(2): 52-55 |
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| Authors: | LI Shi-zhou LIAO Hua WANG Jian-qiu XIE Ming-da LI Ze-dong LIU Tao |
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| Affiliation: | 1.Key Laboratory of Advance Technology and Preparation for Renewable Energy Materials,ministry of Education,Yunnan Province Key Lab of Rural Energy Engineering,Solar Energy Research Institute,Yunnan Normal University ,Kunming 650092,China;) |
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| Abstract: | By comparing various methods used to prepare TiO2 films,it is found magnetron sputtering is the best method for the preparation of TiO2 films.Though ion beams puttering and pyrolysis methods are less reported,they are worth to be further studied. |
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| Keywords: | Titanium dioxide Thinfilm Preparation |
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