| Hg1—xCdxTe液相外延薄膜的貌相分析 |
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| 引用本文： | 朱基千,李标.Hg1—xCdxTe液相外延薄膜的貌相分析[J].华东理工大学学报(自然科学版),1997,23(1):68-72. |
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| 作者姓名： | 朱基千 李标 |
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| 作者单位： | 华东理工大学无机材料系，中国科学院上海技术物理研究所红外物理国家实验室 |
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| 基金项目： | 863重点攻关课题资助项目 |
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| 摘 要： | 用扫描电子显微镜、能量散射Ｘ－射线分析及金相显微镜等方法，研究了Ｈｇ１－ｘＣｄｘＴｅ液相外延薄膜的表面形貌与衬底沾污等的关系，以及外延层夹杂和晶界存在的影响。结果表明，衬底沾污及晶界的存在会使外延薄膜的貌相变差；生长前衬底表面覆盖可以减轻其表面沾污，用适当的回熔ＬＰＥ工艺，可以改进外延层表面形貌及质量
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| 关 键 词： | 貌相 晶体质量 Hg1－xCdxTe 液相外延 回熔工艺 |
Investigation of the Morphology of Hg 1- x Cd x Te Liquid Phase Epitaxial Films |
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| Zhu Jiqian,Li Biao,Chu Junhao,Chen Xinqiang,Cao Juying,and Cheng Jijian.Investigation of the Morphology of Hg 1- x Cd x Te Liquid Phase Epitaxial Films[J].Journal of East China University of Science and Technology,1997,23(1):68-72. |
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| Authors: | Zhu Jiqian Li Biao Chu Junhao Chen Xinqiang Cao Juying and Cheng Jijian |
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| Institution: | Zhu Jiqian 1) Li Biao 2) Chu Junhao 2) Chen Xinqiang 2) Cao Juying 2) and Cheng Jijian 1) 1 |
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| Abstract: | Scaning electron micrscopy (SEM), energy despersive X ray analysis (EDX) and optical microscope were used to study the Hg 1- x Cd x Te liquid phase epitaxial (LPE) films. The results showed that the epi film morphology depended upon the substrate quality, the substrate preparation and growth condition. Quality substrate without grain boundary is the prerequisite for the production of perfect epi film. While a protected coverage on the substrate during the homogenization period and melt back LPE growth mode are also helpful to improve the surface morphology and quality. |
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| Keywords: | morphology crystaline quality Hg 1- x Cd x Te liquid phase epitaxy melt back mode |
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