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钢表面化学气相沉积碳化硅及其高温腐蚀行为
引用本文:王兴华,郭成言.钢表面化学气相沉积碳化硅及其高温腐蚀行为[J].吉林工学院学报,2003,24(3):28-31.
作者姓名:王兴华  郭成言
作者单位:[1]吉林省质量技术监督局装备中心,吉林长春130041 [2]长春工业大学材料工程学院,吉林长春130012
摘    要:研究了耐热钢表面化学气相沉积碳化硅的工艺.比较了耐热钢、碳化钛膜和碳化钛/碳化硅双层膜在O2 Br2 Ar气氛中的高温腐蚀行为,通过热力学分析,解释了腐蚀动力学现象.证明了在耐热钢表面被覆碳化钛/碳化硅双层膜可以大幅度提高其抗高温腐蚀能力。

关 键 词:碳化硅膜  化学气相沉积  高温腐蚀  氧-溴-氩气氛
文章编号:1006-2939(2003)03-0028-04
修稿时间:2003年4月11日

Formation of SiC Coating on Steel by CVD and Its High Temperature Corrosion Behaviour
WANG Xing-hua,GUO Cheng-yan.Formation of SiC Coating on Steel by CVD and Its High Temperature Corrosion Behaviour[J].Journal of Jilin Institute of Technology,2003,24(3):28-31.
Authors:WANG Xing-hua  GUO Cheng-yan
Abstract:Deposition process of SiC on the surface of a heat resisting steel OCr19Ni9 by CVD was investigated. High temperature corrosion behaviours of OCr19Ni9, TiC coating and SiC coating in an O2-Br2-Ar atmosphere were compared. The corrosion kinetics of SiC is interpreted in terms of thermodynamics. It is proved that a dual layer film of TiC/SiC deposited on the heat resisting steel can greatly improve its high temperature corrosion resistance.
Keywords:SiC films  CVD  high temperature corrosion  O2-Br2-Ar atmosphere  
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