| 离子轰击碳膜诱导碳纳米尖端的形成和生长 |
| |
| 引用本文： | 王廷志,王必本.离子轰击碳膜诱导碳纳米尖端的形成和生长[J].河南师范大学学报(自然科学版),2006,34(3):99-102. |
| |
| 作者姓名： | 王廷志 王必本 |
| |
| 作者单位： | 1. 江南大学,理学院,江苏,无锡,214122
2. 北京工业大学,应用数理学院,北京,100022 |
| |
| 摘 要： | 用CH4、NH3和H2为反应气体,利用等离子体增强热丝化学气相沉积系统在沉积有碳膜的Si上制备了碳纳米尖端.用扫描电子显微镜、原子力显微镜和Raman光谱表征了碳膜的结构,以及用扫描电子显微镜和X射线光电子谱表征了碳纳米尖端的结构,结果表明碳膜是凸凹不平的非晶碳膜,碳纳米尖端是由sp2结构的碳组成.根据有关离子的溅射和沉积机制,分析了离子轰击碳膜诱导碳纳米尖端的形成和生长.
|
| 关 键 词： | 碳纳米尖端 离子轰击 化学气相沉积 |
| 文章编号： | 1000-2367（2006）03-0099-04 |
| 收稿时间： | 2006-02-21 |
| 修稿时间： | 2006-02-21 |
Ion Bombardment Induced Formation and Growth of Carbon Nanotips from Carbon Film |
| |
| WANG Ting-zhi,WANG Bi-ben.Ion Bombardment Induced Formation and Growth of Carbon Nanotips from Carbon Film[J].Journal of Henan Normal University(Natural Science),2006,34(3):99-102. |
| |
| Authors: | WANG Ting-zhi WANG Bi-ben |
| |
| Institution: | 1. School of Science, Southern Yangtze University, Wuxi 214122,China; 2. College of Applied Mathematics and Physics, Beijing University of Technology, Beijing 100022,China |
| |
| Abstract: | Carbon nanotips were prepared from a carbon film deposited on silicon by plasma-enhanced hot filament chemical vapor deposition using CH4, NH3 and H2 as the reaction gases. The carbon film was characterized by scanning electron microscopy, Raman spectrometry and atomic force microscopy, and the carbon nanotips were characterized by scanning electron microscopy and X-ray photoelectron spectroscopy. The results indic,ate that the carbon film is an amorphous carbon film with grooves and spikes and the carbon nanotips are composed of sp2 carbon. According to the mechanism related to ion sputtering and deposition, it was analyzed that the formation and growth of the carbon nanotips from the carbon film were induced by ion bombardment. |
| |
| Keywords: | carbon nanotips ion bombardment chemical vapor deposition |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
|
