| 有机LED聚合物薄膜的制备工艺研究 |
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| 引用本文： | 钟志有,刘陈,尹盛,徐重阳.有机LED聚合物薄膜的制备工艺研究[J].华中科技大学学报(自然科学版),2003,31(2):37-39. |
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| 作者姓名： | 钟志有 刘陈 尹盛 徐重阳 |
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| 作者单位： | 华中科技大学电子科学与技术系 |
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| 基金项目： | 国家高技术研究发展计划项目 ( 2 0 0 2AA3 0 2 60 ) |
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| 摘 要： | 采用两次重复的2^3析因实验设计，应用方差分析方法，研究了旋涂工艺中聚合物溶液的浓度，匀胶机的旋涂速度和加速度对旋涂的薄膜厚度和薄膜均匀性的影响。实验和分析的结果表明：溶液浓度和和旋涂速度对膜厚和薄膜均匀具有显著性的影响，而旋涂加速度对它们的影响则不显著。这一结论对于制备优质薄膜、改善聚合物发光器件性能具有重要的指导作用。
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| 关 键 词： | 有机LED聚合物薄膜 制备工艺 旋涂工艺 方差分析 薄膜厚度 薄膜均匀性 |
| 文章编号： | 1671-4512(2003)02-0037-03 |
| 修稿时间： | 2001年8月21日 |
Preparation of polymer thin-film of organic LED |
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| Zhong Zhiyou Liu Chen Yin Sheng Xu Chongyang Zhong Zhiyou Doctoral candidate, Dept. of Electronic Sci. & Tech.,Huazhong Univ. of Sci. & Tech.,Wuhan ,China..Preparation of polymer thin-film of organic LED[J].JOURNAL OF HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY.NATURE SCIENCE,2003,31(2):37-39. |
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| Authors: | Zhong Zhiyou Liu Chen Yin Sheng Xu Chongyang Zhong Zhiyou Doctoral candidate Dept of Electronic Sci & Tech Huazhong Univ of Sci & Tech Wuhan China |
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| Institution: | Zhong Zhiyou Liu Chen Yin Sheng Xu Chongyang Zhong Zhiyou Doctoral candidate, Dept. of Electronic Sci. & Tech.,Huazhong Univ. of Sci. & Tech.,Wuhan 430074,China. |
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| Abstract: | Two replicates of the 2 3 factorial design and analysis of variance methods were applied to the study of the film thickness and film uniformity which were influenced by polymer concentration, spin velocity and spin acceleration in process of spin coating. After performing and analyzing a two replicates of the 2 3 factorial experiment, it is concluded that polymer concentration and spin velocity have statistically significant effects on film thickness and film uniformity. Spin acceleration does not. This conclusion is essential for preparing high quality film and improving the performance of polymer LED. |
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| Keywords: | polymer LED thin film spin coating analysis variance |
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