| 高取向 KTN 薄膜的 PLD 法制备研究 |
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| 引用本文： | 马卫东,张端明,王世敏,王晓东.高取向 KTN 薄膜的 PLD 法制备研究[J].华中科技大学学报(自然科学版),1998(7). |
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| 作者姓名： | 马卫东 张端明 王世敏 王晓东 |
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| 作者单位： | 华中理工大学物理系 |
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| 基金项目： | 激光技术国家重点实验室资助项目 |
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| 摘 要： | 用Ｓｏｌ－Ｇｅｌ法自制了ＫＴＮ陶瓷，以之为靶材，首次在单晶硅上用ＰＬＤ技术沉积了ＫＴＮ薄膜，并对所制备的薄膜进行了ＸＲＤ和ＳＥＭ分析及Ｐ－Ｅ电滞回线观察．观察分析结果表明：薄膜的主晶相为钙钛矿相（约９８％），且沿（１００）方向取向生长；薄膜表面光滑、无裂纹、致密性好；薄膜具有良好的铁电性质．同时还分析了Ｓｉ（１００）单晶衬底上钙钛矿相的形成机理；并讨论了衬底温度Ｔｓ和氧气氛等因素对成膜的影响．
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| 关 键 词： | KTN薄膜 焦绿石相 钙钛矿相 脉冲激光沉积 |
Research of the Preparation of Highly Oriented KTN Films by PLD |
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| Ma Weidong Postgraduate, Dept. of Physics,HUST,Wuhan,China. Zhang Duanmin Wang Shimin Wang Xiaodong.Research of the Preparation of Highly Oriented KTN Films by PLD[J].JOURNAL OF HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY.NATURE SCIENCE,1998(7). |
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| Authors: | Ma Weidong Postgraduate Dept of Physics HUST Wuhan China Zhang Duanmin Wang Shimin Wang Xiaodong |
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| Institution: | Ma Weidong Postgraduate, Dept. of Physics,HUST,Wuhan,430074,China. Zhang Duanmin Wang Shimin Wang Xiaodong |
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| Abstract: | KTN ceramics are prepared by Sol Gel using these ceramics as a target, and some highly oriented KTN thin films prepared by PLD on P Si (1 0 0) substrate. XRD, SEM and P E analytic results indicate that KTN being perovskite structure with (1 0 0) orientation is the major phase (>98%). The surface of the films is smooth, homogeneous, crack free and dense. The films appear typical hysteresis loops. The forming mechanism of KTN thin films on P Si (1 0 0) substrate and the effects of the substrate temperature (T s), oxygen and the quality of the target on the structure of the thin films are discussed. |
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| Keywords: | KTN films pyrochlore phase perovskite phase PLD technology |
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