A Miniature Large Displacement Linear Nanopositioning Piezoelectric Actuator

A miniature linear piezoelectric actuator which moves based on inertia friction theory is described in this paper. The authors discuss its driving principle, dynamic model and experimental results. The piezoelectric actuator includes two piezoelectric elements. Through the sequentially deformations of the two piezo elements, the moving mass slides a miniature displacement. Many strokes will be added to be a large displacement. This type of piezoactuator has advantages in its dimension and motion type, so it can be miniaturized to do micro manipulation or micropositioning in microspace.