相移干涉计量中的相位调制方法及实现

讨论了相移干涉计量中的相位调制方法及实现方法，进而提出并研制了适于连续相移干涉计量的外同步控制相位调制系统，实验结果表明其线性度优于３％，该系统已成功地用于自行研制的２ＤＳＲＯＰ１型高精度表面粗糙度轮廓仪中，仪器示值误差小于１６％，示值变动性小于３７％．

Phase Modulation in Phase Shift Interferometry

The method and realization of the phase modulation in phase shift interferometry are discussed. A new phase modulating system with external synchro control for phase shift interferometry is developed. It is characterized by better linearity of phase modulation and reliable and accurate synchronization. Experimaental results show that the linearity is ove 3%. The system has been successfully used in a type 2 D SROP 1 optical profiler developed by the authors for surface roughness measurement. The error of measurement is less than 1 6% and the variation of the value indication is within 3 7%.