| 正弦电源驱动下氯化氪准分子灯的特性研究 |
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| 引用本文： | 庄晓波,朱绍龙,张善端.正弦电源驱动下氯化氪准分子灯的特性研究[J].复旦学报(自然科学版),2010(6). |
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| 作者姓名： | 庄晓波 朱绍龙 张善端 |
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| 作者单位： | 复旦大学电光源研究所; |
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| 基金项目： | 国家自然科学基金(50407005)资助项目 |
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| 摘 要： | 介绍了基于介质阻挡放电的氯化氪(KrCl*)准分子灯的光谱、输入功率以及222 nm的辐射效率.KrCl*准分子灯为同轴结构,内管和外管的内/外径分别为14/16,37.6/40 mm.灯内总气压为200 hPa,其中含2 hPa氯气和198 hPa氪气.KrCl*准分子灯由正弦电源驱动.测定辐照度后,通过Keitz公式计算222 nm的辐射功率,而灯的功率则通过示波器结合高压探头和电流互感器来测量.结果表明,KrCl*准分子灯在正弦电源频率48.4 kHz,输入功率150 W时222 nm辐射的最佳效率为5.3%.
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| 关 键 词： | 氯化氪准分子灯 介质阻挡放电 222nm辐射 辐射效率 |
Characteristics of Krypton Chloride Excimer Lamps Driven by Sinusoidal ECG |
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| ZHUANG Xiao-bo,ZHU Shao-long,ZHANG Shan-duan.Characteristics of Krypton Chloride Excimer Lamps Driven by Sinusoidal ECG[J].Journal of Fudan University(Natural Science),2010(6). |
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| Authors: | ZHUANG Xiao-bo ZHU Shao-long ZHANG Shan-duan |
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| Institution: | ZHUANG Xiao-bo,ZHU Shao-long,ZHANG Shan-duan(Institute for Electric Light Sources,Fudan University,Shanghai 200433,China) |
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| Abstract: | The spectrum,input power and 222nm radiation efficiency were measured for coaxial KrCl* excimer lamps based on the dielectric barrier discharge(DBD).The outer diameter(OD) of the inner tube of the lamp is 16mm with wall thickness of 2mm,while the OD of the outer tube is 40mm with wall thickness 1.2mm.The total pressure was 200hPa with chlorine 2hPa and krypton 198hPa.The lamps were driven by sinusoidal electronic control gear(ECG).The 222nm radiation power was derived from irradiance,according to the Keitz ... |
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| Keywords: | KrCl* excimer lamps DBD 222nm radiation radiation efficiency |
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