| 静电式超声检测换能器的设计 |
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| 引用本文： | 张小凤,尚志远.静电式超声检测换能器的设计[J].陕西师范大学学报,2001,29(4):47-50. |
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| 作者姓名： | 张小凤 尚志远 |
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| 作者单位： | 张小凤（陕西师范大学应用声学研究所,陕西,西安,710062）
尚志远（陕西师范大学应用声学研究所,陕西,西安,710062） |
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| 基金项目： | 国家自然科学基金资助项目(39870467) |
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| 摘 要： | 采用镀有铜膜的聚酯薄膜和刻有网状槽的背电极，制作了一种频率为42.08kHz的空气静电换能器，并通过实验，检测了该换能器的发射和接收响应。结果表明，该换能器的共振频率为42.8kHz，带宽约为换能器共振频率的50％.
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| 关 键 词： | 静电换能器 脉冲响应 共振频率 超声检测换能器 工作原理 设计 |
| 文章编号： | 1001-3857(2001)04-0047-04 |
| 修稿时间： | 2001年5月19日 |
Principle and design of micromachined air-coupled electrostatic ultrasonic transducer |
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| ZHANG Xiao-feng,SHANG Zhi-yuan.Principle and design of micromachined air-coupled electrostatic ultrasonic transducer[J].Journal of Shaanxi Normal University: Nat Sci Ed,2001,29(4):47-50. |
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| Authors: | ZHANG Xiao-feng SHANG Zhi-yuan |
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| Abstract: | The frequency equation by treating the electrostatic ultrasonic transducer as a mass -spring oscillator is analyzed. A air-coupled electrostatic ultrasonic transducer is manufactured by using the dielectric films and a metal rectangle grooved back-plate. Its resonant frequency is 42.08 kHz. Through the experiment, the transmitting and receiving response of the transducer are detected. The experiment results showed that the transducer has resonant frequency of 42.8 kHz and its bandwidth up to the 50% of it. |
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| Keywords: | electrostatic transducer frequency impulse response |
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