| 提高半导体气敏元件检测能力的研究 |
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| 引用本文： | 边志华.提高半导体气敏元件检测能力的研究[J].太原理工大学学报,2000,31(2):113-115. |
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| 作者姓名： | 边志华 |
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| 作者单位： | 太原理工大学图书馆 |
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| 基金项目： | 煤炭科学基金资助项目! ( 96电 10 611) |
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| 摘 要： | 通过对半导体气敏元件基体材料和制作工艺的分析研究，指出了提高气敏元件检测能力的途径。采用添加技术，超微细化技术，表面修饰技术和控制工作温度，可提高气敏元件的灵敏度和选择性。恒流加热法是提高气敏元件热稳定性的主要手段，新材料，新技术的引入将进一步改进半 气敏元件的性能。
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| 关 键 词： | 气敏元件 灵敏度 热稳定性 半导体 检测能力 |
Study on Raising Measuring Ability of Semiconductor Gas Sensors |
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| Bian Zhihua.Study on Raising Measuring Ability of Semiconductor Gas Sensors[J].Journal of Taiyuan University of Technology,2000,31(2):113-115. |
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| Authors: | Bian Zhihua |
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| Institution: | Library of Taiyuan University of Technology |
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| Abstract: | The analysis on fundamental material and manufacturing technology for gas sensitive elements of semiconductor provides an effective approach for raising measuring ability of gas sensitive elements.The utilization of additive technology,surface modifying and control of working temperature may raise the sensitivity and selectivity of gas sensitive elements.The introduction of new material and advanced technology will further improve their functions. |
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| Keywords: | gas sensor sensitivity thermostability |
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