| 用透射电镜和Raman谱研究非晶硅晶化过程 |
| |
| 引用本文： | 顾清,鲍希茂.用透射电镜和Raman谱研究非晶硅晶化过程[J].南京大学学报(自然科学版),1991,27(4):667-672. |
| |
| 作者姓名： | 顾清 鲍希茂 |
| |
| 作者单位： | 南京大学物理系，南京大学物理系 |
| |
| 摘 要： |
|
| 关 键 词： | 非晶硅 激光结晶 喇曼谱 透射电镜 |
INVESTIGATION OF a-Si:H LASER CRYSTALLIZATION BY TEM AND RAMAN SPECTRA |
| |
| Gu Qing Bao Ximao.INVESTIGATION OF a-Si:H LASER CRYSTALLIZATION BY TEM AND RAMAN SPECTRA[J].Journal of Nanjing University: Nat Sci Ed,1991,27(4):667-672. |
| |
| Authors: | Gu Qing Bao Ximao |
| |
| Institution: | Department of Physics |
| |
| Abstract: | The laser crystallization of a-Si:H was analyzed by using TEM and Raman spectra. The results show that two of the four crystallized zones, LP-LCR and OD, are liquid-phase crystallization and that the remaining two zones, FCR-2 and FCR-1, are sol- id-phase crystallization. The grain size of LP-LCR meets the demands of devices. The phenomena appearing in crystallizing process were explained by temperature field model. Differences between TEM and Raman in analysis of a-Si:H crystallization were discussed. |
| |
| Keywords: | amorphous silicon laser crystallization raman spectra transmission electron microscope |
| 本文献已被 CNKI 维普 等数据库收录！ |
|
