| Si纳米线的Au催化固-液-固生长与结构表征 |
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| 引用本文： | 范志东,白振华,马蕾,彭英才.Si纳米线的Au催化固-液-固生长与结构表征[J].河北大学学报(自然科学版),2009,29(4):357. |
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| 作者姓名： | 范志东 白振华 马蕾 彭英才 |
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| 作者单位： | 河北大学,电子信息工程学院,河北,保定,071002 |
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| 基金项目： | 河北省自然科学基金资助项目 |
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| 摘 要： | 为:Au膜层厚度为5～10 nm,温度为1 100 ℃,N2气流量为1.5 L/min.
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| 关 键 词： | Si纳米线 Au催化 热退火 固-液-固生长 结构表征 |
Au Catalytical Growth of Silicon Nanowires Using Solid-liquid-solid Mechanism and Its Structural Characteristics |
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| FAN Zhi-dong,BAI Zhen-hua,MA Lei,PENG Ying-cai.Au Catalytical Growth of Silicon Nanowires Using Solid-liquid-solid Mechanism and Its Structural Characteristics[J].Journal of Hebei University (Natural Science Edition),2009,29(4):357. |
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| Authors: | FAN Zhi-dong BAI Zhen-hua MA Lei PENG Ying-cai |
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| Institution: | College of Electronic and Informational Engineering;Hebei University;Baoding 071002;China |
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| Abstract: | Si nanowires was grown on N-(111)Si substrates coated by using a thin layer(2~20 nm) of gold acts as metallic catalyst at 1 000~1 100 ℃ and N2 flow rate of 0.4~2.0 L/min based on the solid-liquid-solid(SLS) mechanism.The measurement of scanning electron microscop(SEM) shows that the synthesized nanowires with diameter varied from 50 to150 nm and lengths more than several or dozens of micrometers,respectively.The effects of the annealing temperature,thickness of Au film and N2 flow rate on the formation and structures of Si nanowires are disscussed.The results indicated that the proper parameters to realize Si nanowires with high density,uniform distribution and similar direction are as follows:the thickness of Au film is between 5nm and 10 nm,the temperature is 1 100 ℃,and the flow of N2 is 1.5 L/min. |
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| Keywords: | silicon nanowires Au catalyst thermal anneal solid-liquid-solid growth structural characterization |
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