影响磁控溅射镀膜生产线真空度的因素和处理方法

目前,磁控浅射镀膜生产线正在国内逐步推广应用.本文是根据七年来在国产第一条镀膜生产线调试、生产工作中积累的实践经验,概述了影响真空度的因素和处理方法,同时介绍了机械泵、罗茨泵和扩散泵在使用时应该注意的事项.

The Factors to Affect the Vacuum ofthe Magnetic Sputtering Coating SystemIn-Line and Measures to be Taken

s The Magnetic Sputtering Coating System In-Line is used gradually in our coun-try nowdays. This article summarizes the factors affecting the vacuum degree and measureswe should take according to the accumulated experience of seven years through the testingand operating of the first coating production line in China, and inrtoduces matters needing at-tention in the use of Mechanical pump, Roots pump and Diffusion pump in the samtime.