| 厚膜压力传感器的研究 |
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| 引用本文： | 潘晓光,汤清华.厚膜压力传感器的研究[J].华中科技大学学报(自然科学版),1997(5). |
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| 作者姓名： | 潘晓光 汤清华 |
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| 作者单位： | 华中理工大学固体电子学系 |
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| 基金项目： | 华中理工大学校科学基金 |
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| 摘 要： | 用厚膜工艺制造压力传感器．研究了厚膜电阻浆料的电阻率与压阻系数的关系．承压基片选用ＺｒＯ２－Ｙ２Ｏ３３ｍｏｌ％增韧Ａｌ２Ｏ３陶瓷，大大地提高了压力传感器的性能．对承压片的应力分布进行了分析，介绍了压力传感器的结构设计方法
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| 关 键 词： | 厚膜 压力传感器 压阻效应 |
A Study on the Thick Film Pressure Sensor |
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| Pan Xiaoguang Dept. of Solid State Electronics,HUST,Wuhan ,China. Tang Qinghua.A Study on the Thick Film Pressure Sensor[J].JOURNAL OF HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY.NATURE SCIENCE,1997(5). |
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| Authors: | Pan Xiaoguang Dept of Solid State Electronics HUST Wuhan China Tang Qinghua |
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| Institution: | Pan Xiaoguang Dept. of Solid State Electronics,HUST,Wuhan 430074,China. Tang Qinghua |
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| Abstract: | Thick film technology has been used to prepare the pressure sensor. The relationship between the resistivity and the piezo resistance coefficient of the thick film resistive paste is studied. The Al 2O 3 ceramics toughened with ZrO 2 Y 2O 3 3mol% is selected as the pressure bearing substrate, which improves significantly the sensor performance. The stress distribution on the substerate is analyzed. The constructional design of the sensor is described. |
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| Keywords: | thick film piezo resistive effect pressure sensor |
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