| 掺铝氧化锌(AZO)薄膜制备及结合机理探索 |
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| 引用本文： | 汤辉,侯大寅.掺铝氧化锌(AZO)薄膜制备及结合机理探索[J].安徽工程科技学院学报,2009,24(2). |
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| 作者姓名： | 汤辉 侯大寅 |
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| 作者单位： | 安徽工程科技学院,安徽省纺织面料重点实验窒,安徽芜湖,241000 |
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| 基金项目： | 安徽省自然科学基金，安徽省高等学校自然科学基金 |
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| 摘 要： | 利用射频磁控溅射法以ZnO:Al2O3陶瓷靶材为源在丙纶非织造布上制备了AZO薄膜.采用扫描电镜(SEM)分析溅射时间对薄膜微结构的影响.结合能谱分析仪(EDX)对薄膜成分进行分析表征.分析探讨了在丙纶非织造布上溅射沉积纳米薄膜与基材的结合机理.结果表明:随着溅射时间的延长,薄膜的均匀性致密性越来越好;溅射得到的纳米薄膜元素的特征峰明显,纯度高;薄膜与基材之问结合是物理、化学等多种力共同作用的结果.
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| 关 键 词： | 磁控溅射 AZO薄膜 扫描电镜 能谱仪 |
Al-doped zinc oxide thin film preparation and integration mechanism |
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| TANG Hui,HOU Da-yin.Al-doped zinc oxide thin film preparation and integration mechanism[J].Journal of Anhui University of Technology and Science,2009,24(2). |
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| Authors: | TANG Hui HOU Da-yin |
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| Institution: | TANG Hui,HOU Da-yin(Anhui Provincial Key Laboratory of Textile Fabric,Anhui University of Technology , Science,Wuhu 241000,China) |
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| Abstract: | ZnO: Al2O3 ceramic target has been deposited on PP nonwoven substrates by RF magnetron sputtering in the preparation of AZO film.Using scanning electron microscopy(SEM) analysis of the influence of sputtering time on micro-film structure and spectrum analyzer(EDX) analysis of the film composition characterization.The paper studied and discussed the combining mechanism of the nano-thin film sputtering and the substrate on the polypropylene non-woven fabric.The results showed that with the sputtering time,the... |
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| Keywords: | magnetron sputtering AZO film scanning electron microscopy EDX |
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