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Al-Ti合金阳极氧化膜的化学组成及微观结构
引用本文:宋晔,曹婉真. Al-Ti合金阳极氧化膜的化学组成及微观结构[J]. 西安交通大学学报, 1995, 0(12)
作者姓名:宋晔  曹婉真
摘    要:着重研究了Al含量顺次递增的3种组分,Al-Ti合金阳极氧化膜的化学组成及微观结构。用XPS俗分析表明:氧化膜是由Al2O3和TiO2组成,经AES深度剖面分析得到了两者之间的比例,并推理出膜的微观结构模型,用SEM观测了3种膜的表面形貌,清楚地看到:合金组分不同,膜的致密度不同。XRD实验证明:氧化膜的晶型较复杂,且有取向。

关 键 词:Al-Ti合金;阳极氧化膜;微观分析

THE CHEMICAL COMPOSITION AND MICROSTRUCTURE OF ANODIC OXIDE FILMS ON AL-TI ALLOY
Song Ye, Cao Wanzhen. THE CHEMICAL COMPOSITION AND MICROSTRUCTURE OF ANODIC OXIDE FILMS ON AL-TI ALLOY[J]. Journal of Xi'an Jiaotong University, 1995, 0(12)
Authors:Song Ye   Cao Wanzhen
Affiliation:School of Electronic and Information Engineering
Abstract:The Chcmical compositions and microstructure of anodic oxide films on three types ofAl-Ti alloy samples with Al content increasing one after another were investigated. The ox-ides were examined with X-ray photoelectron spectroscopy(XPS).It was shown that the an-odic films were composed of Al2O3 and TiO2.The ratio of Al2O3 to TiO2 in films in directionof its thickness were obtained by Auger electron spectrospy(AES).The microstructural mod-el of the anodic films was proposed.Surface morphlogies of three types alloy of films wereobserved by means of scanning electron microscope(SEM)in order to find out the relationspipbetween dielectric properties of films and the microstructure. From XRD patterns.it was con-firmed that this kind of anodic oxide films were crystalline.
Keywords:Al-Ti alloy anodicoxide films surface analyses  
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