基于声表面波谐振器的三维纳米团簇敏感薄膜关键技术研究

设计了一种新型基于声表面波技术的气体传感器,理论分析了三维纳米线结构的比表面积大、灵敏度高等优点,采用具备高Q值和低插损的谐振型声表面波器件结构,制备了三维敏感膜结构的声表面波气体传感器.在此基础上,为提高吸附效应,对三维纳米线簇进行了修饰改进.通过将沙林气和芥子气注入放置了声表面波的气体传感器密闭腔体内,经过神经网络识别系统进行定性识别.实验结果表明,基于修饰改进后的纳米线簇敏感膜制备的声表面波气体传感器对给定毒气混合气体的整理识别率大于90%,能够满足通用的毒气定性检测要求.并且三维纳米声表面波气敏传感器的灵敏度和响应速度优于传统的传感装置,在识别系统加大样本数据量时,能够进一步提高识别精度.

Research on key technologies of 3D nano cluster sensitive film based on SAW resonator

This research attempts to design a new type of surface acoustic wave (SAW) gas sensor that integrates both the three-dimensional nanostructure technology and the SAW technology and thereby makes use of their advantages in sensitivity and specific surface area, respectively.By taking advantage of the resonant surface acoustic wave(SAWR)'s high Q-factor and low insertion loss characteristic, this paper mainly focuses on the design of the SAW chip and modification of the nanowires structure.Finally,through pumping the Sarin and HD gas into the sample pool of the 3D nano-SAW gas sensor with Back-Propagation Network recognize algorithm, As shown by the experiment results, the overall distinguishable rate is more than 90%, and the 3D nano-SAW gas sensor is superior to traditional sensing devices concerning the sensitivity, identification accuracy, and response speed.