| 微小平面电感线圈近场涡流效应模型 |
| |
| 引用本文： | 王鹏,丁天怀,傅志斌.微小平面电感线圈近场涡流效应模型[J].清华大学学报(自然科学版),2009(5). |
| |
| 作者姓名： | 王鹏 丁天怀 傅志斌 |
| |
| 作者单位： | 清华大学精密测试技术与仪器国家重点实验室; |
| |
| 基金项目： | 国家自然科学基金资助项目(60702001);;传感技术联合国家重点实验室基金资助项目(skt0707) |
| |
| 摘 要： | 微小平面电感线圈是一种新型的近场电涡流检测敏感器件,能够应用于复杂表面之间和微机电系统中实现准确的位移测量或无损检测。为了研究微小平面电感线圈的近场涡流效应对其自感和阻抗的影响规律,以轴对称时谐电磁场理论为基础,根据微小平面线圈近场涡流效应的特点,建立了描述微小平面线圈的自感和阻抗变化的数学模型,并进行了详细的模型解析和实验验证。验证结果表明,建立的数学模型具有很强的可计算性,并能够与实验结果很好地相符合,可以为微型平面线圈电涡流传感器的设计提供依据和指导。
|
| 关 键 词： | 平面电感线圈 电涡流 数学模型 电磁场 |
Near-field eddy currents in small planar inductance coils |
| |
| WANG Peng,DING Tianhuai,FU Zhibin.Near-field eddy currents in small planar inductance coils[J].Journal of Tsinghua University(Science and Technology),2009(5). |
| |
| Authors: | WANG Peng DING Tianhuai FU Zhibin |
| |
| Institution: | State Key Laboratory of Precision Measurement Technology and Instruments;Tsinghua University;Beijing 100084;China |
| |
| Abstract: | A small planar inductance coil is a sensitive non-contact device whose measurements are based on the near-field eddy current.The coil can be used for nondestructive measurements of displacements or distances between very small surfaces,such as in micro-electro-mechanical systems.The relationship between the near-field eddy current and the free inductance and impedance of the coil was modeled based on axially symmetric time-harmonic electromagnetic theory.The coil was also tested experimentally.The model res... |
| |
| Keywords: | planar inductance coil eddy current mathematic model electromagnetic |
| 本文献已被 CNKI 等数据库收录！ |
