| 用三光束干涉法测量薄膜厚度 |
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| 引用本文： | 吴震,张平,缪欣. 用三光束干涉法测量薄膜厚度[J]. 华中科技大学学报(自然科学版), 1992, 0(4) |
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| 作者姓名： | 吴震 张平 缪欣 |
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| 作者单位： | 华中理工大学光电子工程系(吴震，张平)，华中理工大学光电子工程系(缪欣) |
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| 基金项目： | 国家自然科学基金资助项目 |
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| 摘 要： | 本文用三光束干涉法非接触地测量了薄膜厚度.该方法把位于中间的零级光作为测试光束,位于两侧的±1级光作为参考光束,不但具有精度高的特点,而且稍作改进还能用于其它多种参数的测量.
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| 关 键 词： | 干涉仪 三光束 光程差 膜厚 测量 傅里叶变换 |
Film Thickness Measurement with the Three Beam Interferoraetric Method |
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| Zhen Zhang Ping Miao Xin. Film Thickness Measurement with the Three Beam Interferoraetric Method[J]. JOURNAL OF HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY.NATURE SCIENCE, 1992, 0(4) |
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| Authors: | Zhen Zhang Ping Miao Xin |
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| Affiliation: | Zhen Zhang Ping Miao Xin |
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| Abstract: | The basic principle of the three beam interferometer is analyzed. The relationships between parameters are described and the method of attaining high sensitivity by optimization is given. An experimental optical path for film thickness measurement with reflective type three beam interfer-ometry is also given. The relationship between the detecting signals and optical path difference is obtained. The sample is placed on a parallelo-grammatic mechanism and the film thickness is measured with high accuracy using 40 line-pairs/mm gratings. A method for precision measurement of very small path differences is suggested, by which path differences as small as 500 and 1000 have been measured. |
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| Keywords: | interferometer three beam optical path difference film thick- ness measurement Fourier transform |
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