表面粗糙度的交流阻抗研究及其在铜电极上的应用

固液界面交流阻抗测量时所得Ｎｙｑｕｉｓｔ图往往为压扁的半圆弧，其等效电路中含常相元件，该元件的分数指数与粗糙表面的分形模型有关，本文提出从Ｎｙｑｕｉｓｔ图计算分散指数与粗糙表面的分数维数的方法，并各种上不同表面处理的铜电极说明计算方法的应用及其结果，文中的方法还可用于表面膜致密程度的表征。

On the Measurement of the Roughness of Electrode Surfaces by the AC Impedance and Its Applications to the Copper Electrodes

For the measurement of roughness of electrode surfaces and compactness of the films of inhibitors on electrodes, Nyquist diagrams have been measured by means of AC impedance techniques. The resulted depressed arcs will show the nature of distributed parameters of the equivalent circuits which may be simplified as a constant phase angle element (CPE) with fractional exponent of the CPE and the correlation of the fractional exponent and the dimension of the fractul model of the electrode are established. The method has been applied tO the surfaces ofcopper electrodes of different roughness and the films of copper inhibitors of different concentrations with satisfactory results.