| KOH溶液制作类圆形硅膜阵列研究 |
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| 引用本文： | 蒋玉荣,陈晨,秦瑞平,杨海刚.KOH溶液制作类圆形硅膜阵列研究[J].河南师范大学学报(自然科学版),2013,41(2):71-73. |
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| 作者姓名： | 蒋玉荣 陈晨 秦瑞平 杨海刚 |
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| 作者单位： | 1. 河南师范大学物理与电子工程学院,河南新乡453007;河南师范大学河南省光伏材料重点实验室,河南新乡453007
2. 河南师范大学物理与电子工程学院,河南新乡,453007 |
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| 基金项目： | 河南省重点科技攻关计划项目，河南师范大学校青年基金 |
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| 摘 要： | 由于单晶硅在碱性腐蚀液中的腐蚀速率呈各向异性,在圆形掩膜下很难实现圆形单晶硅膜的制作.利用添加剂异丙醇(IPA)来改善KOH的腐蚀特性,在KOH与IPA混合腐蚀液体系中制备出类圆形硅膜阵列.通过扫描电镜观察腐蚀图形形貌,结果表明带有图案的N型衬底在质量分数为40%的KOH和IPA构成的混合溶液中,腐蚀出底面平整侧壁光滑的圆形硅膜阵列,并且初步探讨导电类型对腐蚀形貌影响机制.
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| 关 键 词： | 圆形硅膜 MEMS KOH 各向异性腐蚀 |
Like-circular Shape Silicon Membrane Array With KOH-based Solution |
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| JIANG Yurong
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CHEN Chen
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QIN Ruiping
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YANG Haigang.Like-circular Shape Silicon Membrane Array With KOH-based Solution[J].Journal of Henan Normal University(Natural Science),2013,41(2):71-73. |
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| Authors: | JIANG Yurong CHEN Chen QIN Ruiping YANG Haigang |
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| Institution: | a,b(a.College of Physics & Electronic Engineering;b.Henan Key laboratory of photovoltail Materials,Henan Normal University,Xinxiang 453007,China;) |
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| Abstract: | Circular-shape Silicon membrane is hard to be realized with circular-shape mask as etchig rate of Si(100) is anisotropic in KOH solution.In this paper,isopropyl alcohol(IPA) as additive improve the etching characteristics of KOH.The morphology of microstructures were observed through the scanning electron microscopy.The results show that additive IPA is beneficial to fabricate the circular Silicon membrane,and circular-shaped silicon membrane array with smooth underside and smooth wall were fabricated. |
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| Keywords: | circular silicon membrane MEMS KOH anisotropic etching |
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