| 基于MEMS的压电厚膜谐振梁能量收集器的研究 |
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| 引用本文： | 邱成军,尚瑛琦,刘红梅,刘芳,徐勇.基于MEMS的压电厚膜谐振梁能量收集器的研究[J].黑龙江大学自然科学学报,2011,28(4):551-554. |
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| 作者姓名： | 邱成军 尚瑛琦 刘红梅 刘芳 徐勇 |
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| 作者单位： | 1. 黑龙江大学集成电路重点实验室,哈尔滨,150080
2. 韦恩州立大学电子与计算机工程学院,密歇根48202 |
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| 基金项目： | Supported by the Program of the Key Laboratory of Electronics Engineering College of Heilongjiang Province(DZZD-20100009); the Project of Heilongjiang Province Science and Technology(GC06A215) |
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| 摘 要： | 在谐振梁能量收集器中PZT膜材料的制备起着至关重要的作用,复合结构的锆钛酸铅(PZT)厚膜采用溶胶-凝胶方法旋涂在硅基的Au/Cr/SiO2/Si结构衬底的制备方法,主要因为溶胶-凝胶制备方法简单,成本低适合于集成制作.改进PZT组分和和0-3混合法及复合结构的Au/Cr/SiO2/Si衬底,使制备的PZT厚膜避免了厚...
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| 关 键 词： | MEMS 压电效应 能量收集 PZT压电材料 溶胶-凝胶法 |
A MEMS-based energy harvesting for the thick film piezoelectric cantilevers |
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| QIU Cheng-jun,SHANG Ying-qi,LIU Hong-mei,LIU Fang,XU Yong.A MEMS-based energy harvesting for the thick film piezoelectric cantilevers[J].Journal of Natural Science of Heilongjiang University,2011,28(4):551-554. |
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| Authors: | QIU Cheng-jun SHANG Ying-qi LIU Hong-mei LIU Fang XU Yong |
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| Institution: | QIU Cheng-jun1,SHANG Ying-qi1,LIU Hong-mei1,LIU Fang1,XU Yong2(1.The Key Laboratory of Integrated Circuit,Heilongjiang University,Harbin 150080,China,2.Department of Electrical and Computer Engineering,Wayne State University,Detroit MI 48202,USA) |
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| Abstract: | The PZT piezoelectricity films fabrication is the most important part in the energy-harvesting device.A multiple structure for the thick film lead zirconatetitanate Pb(Zr,Ti)O3(PZT) coated on the top of Au/Cr/SiO2/Si substrates by sol-gel-spin method is adopted.Because the PZT film fabrication by the Sol-Gel method equipment required skimpily,cost lower,and suitable for integrated.The PZT thick films also have been improved in order to avoid crack increased in the thickness.The change is not only in the PZT... |
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| Keywords: | MEMS piezoelectric effect energy harvesting PZT piezoelectricity materials Sol-Gel method |
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