| 有限元法在表面波等离子体中的数值模拟应用 |
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| 引用本文： | 陈兆权,胡业林,洪伶俐,杨岸,郑晓亮,李平,黄友锐. 有限元法在表面波等离子体中的数值模拟应用[J]. 安徽理工大学学报(自然科学版), 2011, 0(3): 17-21 |
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| 作者姓名： | 陈兆权 胡业林 洪伶俐 杨岸 郑晓亮 李平 黄友锐 |
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| 作者单位： | 安徽理工大学电气与信息工程学院; |
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| 基金项目： | 华中科技大学研究生科技创新基金资助项目(HF0601708131); 教育部留学归国人员科研启动基金资助项目; 973-ITER计划国内配套基金资助项目(GB105003) |
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| 摘 要： | 工业用平板型表面波等离子体( SWP)源具有大面积、高密度、高活性等优良性能,其建造之前必须进行结构优化,而对表面电磁波的数值模拟,可以辅助其优化设计.基于有限元法( FEM),采用Ansoft HFSS模拟软件,数值仿真了大面积矩形SWP源的电磁场空间分布.研究了开槽天线激发表面波场的特性,得出了表面波场的空间分布,...
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| 关 键 词： | 有限元法 表面波 等离子体 数值模拟 |
Numerical Simulation Application of Finite Element Method in Surface-wave Plasmas |
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| CHEN Zhao-quan,HU Ye-lin,HONG Ling-li,YANG An,ZHENG Xiao-liang,LI Ping,HUANG You-rui. Numerical Simulation Application of Finite Element Method in Surface-wave Plasmas[J]. Journal of Anhui University of Science and Technology:Natural Science, 2011, 0(3): 17-21 |
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| Authors: | CHEN Zhao-quan HU Ye-lin HONG Ling-li YANG An ZHENG Xiao-liang LI Ping HUANG You-rui |
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| Affiliation: | CHEN Zhao-quan,HU Ye-lin,HONG Ling-li,YANG An,ZHENG Xiao-liang,LI Ping,HUANG You-rui(School of Electrical and Information Engineering,Anhui University of Science and Technology,Huainan Anhui 232001,China) |
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| Abstract: | Industrial planar-type surface wave plasma(SWP) source has good performances such as large-area,overdense,high-activity and so on,which must be optimized in structure before its construction and numeric simulation of surface electromagnetic wave can assist in its optimized design.Based on finite element method(FEM),spatial electromagnetic field distribution in a large-area rectangular SWP source was numerically simulated by using simulation software Ansoft HFSS.The character of surface wave excited by slot ... |
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| Keywords: | finite element method surface wave plasma numerical simulation |
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