晶体硅太阳电池的氮化硅表面钝化研究

为了提高晶体硅太阳电池的光电转换效率，研究了用等离子增强化学气相沉积（PECVD）的SiNx：H作为晶体硅太阳电池的表面钝化及减反射膜对电池性能的影响，并采用不同的工艺路线制备了不同类型的电池。实验发现：同SiNx：H比较，SiNx:H/SiO2双层光学减反射结构对晶体硅太阳电池能起到更加有效的表面钝化作用，提高了太阳电池的光电转换效率。基于界面物理，提出了一种新的能带模型，解释了用不同实验方法制作的晶体硅太阳池性能的差异。

Investigation on Passivating Silicon Nitride Surface of Crystalline Silicon Solar Cells

In order to improve photoelectric conversion efficiency of crystalline silicon solar cells,some effects of surface passivation quality and antireflection properties of silicon nitride prepared by plasma enhanced chemical vapour deposition on crystalline silicon solar cells are investigated. All kinds of crystalline silicon solar cells were prepared by different process methods. It was found that the silicon nitride/silicon oxide double layer optical antireflection coatings structure shows excellent passivation properties for crystalline solar cells compared to silicon nitride, so photoelectric conversion efficiency of crystalline silicon solar cells is enhanced. Based on interface physics, a new energy band model of silicon nitride/silicon oxide/silicon is presented, differences of efficiency of crystalline silicon solar cells prepared by different methodes are explained by this model.