| 薄膜材料导热性质的测量 |
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| 引用本文： | 顾毓沁,廖峰.薄膜材料导热性质的测量[J].上海交通大学学报,1999,33(8):983-986. |
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| 作者姓名： | 顾毓沁 廖峰 |
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| 作者单位： | 清华大学,工程力学系,北京,100084 |
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| 摘 要： | 应用交流光热法测量薄膜材料的热扩散率，测量范围为１０－７～１０－３ｍ２／ｓ．对于不同热扩散率的材料样品，在测量中会产生不同类别的系统性误差，如二维效应、散热效应、空气层作用以及端部反射效应．分析了对不同热扩散率的材料样品进行测量时产生系统性误差的类别，并简单介绍了防止和修正的方法．针对聚合物膜、不锈钢箔、铜箔与化学气相沉积金刚石膜等各类材料进行了实测，取得了较满意的结果
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| 关 键 词： | 薄膜 热导率 交流光热法 测量 |
Measurements of Thermal Conductance Property of Thin Films |
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| GU Yu-qin,LIAO Feng.Measurements of Thermal Conductance Property of Thin Films[J].Journal of Shanghai Jiaotong University,1999,33(8):983-986. |
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| Authors: | GU Yu-qin LIAO Feng |
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| Abstract: | AC photothermal method was used for measuring thermal diffusivity of thin film materials with the measurable range from 10 -7 to 10 -3 m 2/s. There are several systematic errors in measurements of different samples such as the two dimensional effect, heat loss effect, air layer effect and the edge reflection effect. Those systematic errors caused in measuring samples of different thin film materials were analyzed and the way for their reduction and correction was simply reviewed. Various samples, such as polymer film, stainless steel foil, copper foil and CVD diamond film were measured. |
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| Keywords: | thin films thermal diffusivity alternating current photothermal methods measurement |
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