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| 椭圆偏振仪测量薄膜厚度和折射率 | |
| 引用本文： | 马逊,刘祖明,陈庭金,廖华. 椭圆偏振仪测量薄膜厚度和折射率[J]. 云南师范大学学报(自然科学版), 2005, 25(4): 24-27 |
| 作者姓名： | 马逊 刘祖明 陈庭金 廖华 |
| 作者单位： | 云南师范大学太阳能研究所,云南省农村能源工程重点试验室,云南,昆明,650092 |
| 基金项目： | 国家“863”资助项目(2001AA513040). |
| 摘 要： | 文章通过对椭偏仪测量原理的分析给出了四区平均消光状态下的计算公式,利用该公式计算在一个周期内的薄膜厚度和折射率结果较好;同时给出了膜厚大于一个周期时的计算方法。 |
| 关 键 词： | 椭圆偏振测量 薄膜厚度 折射率 |
| 文章编号： | 1007-9793(2005)04-0024-04 |
| 修稿时间： | 2004-12-07 |
Thin Film Material Thickness and Refractive Index Measurement by Elliptical Polarization Instrument |
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| MA Xun,LIU Zu-ming,CHEN Ting-Jin,Liao Hua. Thin Film Material Thickness and Refractive Index Measurement by Elliptical Polarization Instrument[J]. Journal of Yunnan Normal University (Natural Sciences Edition), 2005, 25(4): 24-27 | |
| Authors: | MA Xun LIU Zu-ming CHEN Ting-Jin Liao Hua |
| Abstract: | From analyzed measurement elliptical polarization principle the method to calculate average extinction in four areas was presented in this paper. The method calculated thin film thickness and refractive index had a good coherence in one period. The method also can measure thin film thickness over one period. |
| Keywords: | Elliptical polarization measurement film material thickness refractive index |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ | |