减小多光束干涉影响的算法研究

该文译斐索干涉仪中的多光束干涉效应作了研究和分析，并应用移相干涉术的三步法和四步法，分析和比较了多光束干涉对干涉仪测试精度的影响。结果表明，即使２个相干表面未镀膜或反射率很低时，这种影响仍是不可忽视的，但只要选择合适的移相算法，便可有效地加以抑制。

Study on Algorithms Reducing Effect of Multi beam Interference

This paper analyses and studies effects of multibeam interference in Fizean interferometer, compares effects of multi beam interference on the accuracy of interferometer using 3 frame and 4 frame phase shifting interferometry. As shown in results, this kind of effect, which can be reduced effectively by using suitable phase shifting algorithm, can not be neglected even if the two interference surfaces are uncoated or the reflectivities are low. Finally, a computational and stimulating example is given in the paper when R =0 1, which shows that 4 frame method can reduce the multi beam effect on testing accuracy more effectively than 3 frame method.