| 超磁致伸缩-压电直线式蠕动机构的设计 |
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| 引用本文： | 李翠红,叶子申,孟永钢,田煜,温诗铸.超磁致伸缩-压电直线式蠕动机构的设计[J].清华大学学报(自然科学版),2005,45(8):1055-1057. |
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| 作者姓名： | 李翠红 叶子申 孟永钢 田煜 温诗铸 |
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| 作者单位： | 清华大学,精密仪器与机械学系,摩擦学国家重点实验室,北京,100084 |
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| 基金项目： | 国家“八六三”高技术项目(2002AA23240) |
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| 摘 要： | 为研制大行程高精度进给机构,基于蠕动运动原理,以超磁致伸缩微驱动器为驱动元件、嵌入柔性铰链中的压电陶瓷驱动器与V形导轨配合为箝位方式,研制了超磁致伸缩压电直线式蠕动机构样机,并利用计算机对其运动进行了闭环反馈控制。运行测试结果表明,该机构能够稳定地蠕动步进和后退,位移重复定位精度可以达到±15nm。
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| 关 键 词： | 蠕动机构 磁致伸缩 压电 |
| 文章编号： | 1000-0054(2005)08-1055-03 |
| 修稿时间： | 2004年9月2日 |
Linear inchworm mechanism based on giant magnetostrictive and piezoelectric materials |
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| LI Cuihong,YE Zishen,MENG Yonggang,TIAN Yu,WEN Shizhu.Linear inchworm mechanism based on giant magnetostrictive and piezoelectric materials[J].Journal of Tsinghua University(Science and Technology),2005,45(8):1055-1057. |
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| Authors: | LI Cuihong YE Zishen MENG Yonggang TIAN Yu WEN Shizhu |
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| Abstract: | A linear inchworm mechanism was developed with a magnetostrictive actuator and two piezoelectric translators fixed in a specially designed flexible frame to provide both long travel range and high positioning precision. The mechanism movement is controlled by a closed-loop feed back algorithm using a high precision length gauge as the transducer. Test results indicate that the mechanism reliably moves forward and backward with a positioning accuracy of up to 15 nm. |
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| Keywords: | inchworm mechanism magnetostrictive piezoelectric |
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