| 结晶硅材料的单脉冲和多脉冲激光损伤研究 |
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| 引用本文： | 沈中华,陈建平,等.结晶硅材料的单脉冲和多脉冲激光损伤研究[J].南京大学学报(自然科学版),2001,37(1):79-83. |
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| 作者姓名： | 沈中华 陈建平 |
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| 作者单位： | [1]南京大学近代声学国家重点实验室，南京210093 [2]南京理工大学应用物理系，南京210094 |
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| 基金项目： | Supported by the Postdoctoral Foundstion of Nanjing University |
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| 摘 要： | 对半导体材料硅的单脉冲和多脉冲激光损伤现象进行研究，实验结果表明多脉冲激光辐照的损伤阈值比单脉冲的少，且多脉冲激光损伤阈值是与脉冲重复频率相关的，随脉冲重复频率增大而减少，说明损伤过程中累积效应的存在。根据实验结果和理论计算，我们指出热积累并不是损伤阈值降低的唯一原因，并对可能的损伤机理进行了讨论。
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| 关 键 词： | 激光损伤 硅 单脉冲 多脉冲 结晶硅 半导体材料 |
Damage Phenomena Induced by a Single Laser Pulse and Multiple Laser Pulses in Crystal Silicon |
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| Shen Zhonghua,Chen Jianping,Lu Jian,Ni Xiaowu,Zhang Shuyi.Damage Phenomena Induced by a Single Laser Pulse and Multiple Laser Pulses in Crystal Silicon[J].Journal of Nanjing University: Nat Sci Ed,2001,37(1):79-83. |
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| Authors: | Shen Zhonghua Chen Jianping Lu Jian Ni Xiaowu Zhang Shuyi |
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| Abstract: | The damage effects in silicon induced by single pulse and multiple pulses of a Nd: YAG laser with different RPF are presented. The damage phenomena demonstrate that the multiply damage belongs to PRF-dependent damage. We have also discussed the possible mechanisms of the damage induced by multiple laser pulses involving the contributions from thermal accumulation as well as micro-defect accumulation. |
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| Keywords: | laser-induced damage silicon single pulse mnltiple pulses |
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