| 辉光放电氮原子离子束源研制及其质谱研究 |
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| 引用本文： | 郭钊,陈洁.辉光放电氮原子离子束源研制及其质谱研究[J].复旦学报(自然科学版),1998,37(6):743-747. |
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| 作者姓名： | 郭钊 陈洁 |
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| 作者单位： | 复旦大学物理学系国家三束材料改性重点联合实验室!上海，200433 |
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| 摘 要： | 采用辉光放电的方法产生氮原子离子束，束流中Ｎ＾＋／Ｎ２＾＋高达５：１，用飞行时间质谱研究了束流的Ｎ＾＋／Ｎ２＾＋比率与放电条件的关系，指出了提高Ｎ＾＋／Ｎ２＾＋比率的途径。
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| 关 键 词： | 辉光放电 氮原子离子束 飞行时间质谱 |
Study on the Generation of the Atomic Nitrogen Ion Beam by DC Glow Discharge and Its Mass Sprectroscopy |
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| Guo Zhao, Chen Jie, Wang Peinan, Li Fuming.Study on the Generation of the Atomic Nitrogen Ion Beam by DC Glow Discharge and Its Mass Sprectroscopy[J].Journal of Fudan University(Natural Science),1998,37(6):743-747. |
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| Authors: | Guo Zhao Chen Jie Wang Peinan Li Fuming |
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| Institution: | State Key Joint Lab of Materials Modification by Triple Beams |
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| Abstract: | Atomic nitrogen ion beam was generated by DC glow discharge. A very high ratio of N~+/N~+_2, up to 5/1, was achieved. The dependence of the ratio of N~+/N~+_2 on the discharge conditions was studied by time-of-flight mass spectroscopy. |
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| Keywords: | glow discharge atomic nitrogen ion beam time-of-flight mass spectroscopy ratio of N~+/N~+_2 |
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