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柔性衬底上铝背电极制备及相关特性研究
引用本文:岳红云,吴爱民,冯煜东,胡娟,张学宇,李廷举.柔性衬底上铝背电极制备及相关特性研究[J].大连理工大学学报,2011,51(2):210-214.
作者姓名:岳红云  吴爱民  冯煜东  胡娟  张学宇  李廷举
作者单位:大连理工大学材料科学与工程学院;大连理工大学三束材料改性教育部重点实验室;中国空间技术研究院兰州物理所;
基金项目:教育部留学回国人员科研启动基金资助项目(200611AA03); 表面工程技术国家级重点实验室基金资助项目(9140C540105080C5402)
摘    要:采用射频磁控溅射技术在聚酰亚胺柔性衬底上制备硅基薄膜太阳能电池用铝背电板,研究了不同溅射功率和工作气压条件对铝电极薄膜性能的影响.利用原子力显微镜分析表征了薄膜的表面形貌和粗糙度,薄膜的电学性能和光学性能分别采用四探针测量仪和紫外可见近红外分光光度计进行分析表征.测试结果表明:随着溅射功率的增加,薄膜表面均方根粗糙度迅...

关 键 词:薄膜太阳能电池  柔性衬底  背电极  反射光谱

Preparation and characteristics of aluminum back electrodes on flexible substrates
JPYUE Hongyun,WU Aimin,FENG Yudong,HU Juan,ZHANG Xueyu,LI Tingju,JP.Preparation and characteristics of aluminum back electrodes on flexible substrates[J].Journal of Dalian University of Technology,2011,51(2):210-214.
Authors:JPYUE Hongyun  WU Aimin  FENG Yudong  HU Juan  ZHANG Xueyu  LI Tingju  JP
Institution:YUE Hong-yun1,2,WU Ai-min*1,FENG Yu-dong3,HU Juan1,ZHANG Xue-yu1,LI Ting-ju1,21.School of Materials Science and Engineering,Dalian University of Technology,Dalian 116024,China,2.Key Laboratory of Materials Modification,Ministry of Education,3.Lanzhou Institute of Physics,Chinaese Academy of Space Technology,Lanzhou 730000
Abstract:Al thin films were deposited on flexible polyimide substrates by radio frequency magnetron sputtering method to make aluminum back electrode for Si-thin film solar cells.The effects of sputtering power and working pressure on the properties of Al electrodes were carried out.Atomic force microscope(AFM) was used to examine the surface morphology and roughness of the films.The electrical and optical properties of the films were characterized by four-probe meter and UV/VIS near-IR spectrophotometer,respectivel...
Keywords:thin film solar cells  flexible substrate  back electrode  reflectance spectroscopy  
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